Cyclohexasilane is a binary inorganic compound of silicon and hydrogen with the chemical formula .
Synthesis Reaction of lithium tetrahydroaluminate and hexasilicon dodecachloride:
Also, pyrolysis of monosilane and disilane by heating at low pressure followed by fractional distillation.
Physical properties Cyclohexasilane forms a colorless liquid that reacts with water.
The compound is soluble in ethanol and carbon disulfide.
Uses Cyclohexasilane is an important precursor for the deposition of silicon layers from liquid silicon inks in the semiconductor industry.
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