Lutetium(III) fluoride is an inorganic compound with a chemical formula LuF3.

Production Lutetium(III) fluoride can be produced by reacting lutetium oxide with hydrogen fluoride, or reacting lutetium chloride and hydrofluoric acid:Georg Brauer (ed.), In collaboration with Marianne Baudler u. a .: Handbook of Preparative Inorganic Chemistry. 3rd, revised edition. Volume I, Ferdinand Enke, Stuttgart 1975, , p. 254.

It can also be produced by reacting lutetium sulfide and hydrofluoric acid:

 (x = 0.9)

Lutetium oxide and nitrogen trifluoride react at 240 °C to produce LuOF. A second step happens below 460 °C to produce LuF3.

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