Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound with the formula Si[OSi(CH3)3]4. This colourless liquid is used as a reagent in organic synthesis.
Application TTMS can be used for thin film coating with a nanostructured silicon dioxide prepared by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure.
See also Hexamethylcyclotrisiloxane Polymethylhydrosiloxane
References
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