Chemical Vapor Deposition was a monthly peer-reviewed scientific journal covering materials science. It was established in 1995 and ceased independent publication in 2015, when it became a section of Advanced Materials Interfaces. The journal was published by Wiley-VCH and the editor-in-chief was Peter Gregory.

Abstracting and indexing The journal was abstracted and indexed in:

According to the Journal Citation Reports, the journal's final (2016) impact factor was 1.333.

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