Trichloroethylsilane is a compound with formula Si(C2H5)Cl3.

Trichloroethylsilane appears as a colorless fuming liquid with a pungent odor. The compound is highly flammable, corrosive, acutely toxic, and acts as an irritant. It is denser than water, with it's vapors being denser than air. The compound has a flash point of 57 °F (14 °C); and a boiling point of 211.1 °F (99.5 °C).

It is used as a specialized reagent in industrial and academic laboratories. It is also used as a predecessor to synthesize other organosilicon compounds and silicon-based polymers.

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